Integrated circuit
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChieh-Fei CHIU, Wen-Ting CHU, Yong-Shiuan TSAIR, Yu-Wen LIAO, Chih-Yang CHANG, Chin-Chieh YANG
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChieh-Fei CHIU, Wen-Ting CHU, Yong-Shiuan TSAIR, Yu-Wen LIAO, Chih-Yang CHANG, Chin-Chieh YANG
Estimating the term…
An integrated circuit includes a metal/dielectric layer, a second dielectric layer, a bottom electrode, a resistance switch element, and a top electrode. The metal/dielectric layer has a first dielectric layer and a conductive feature in the first dielectric layer. The second dielectric layer is over the metal/dielectric layer. The bottom electrode is over and in contact with the conductive feature and surrounded by the second dielectric layer. The second dielectric layer has a tapered sidewall, a lower portion of the tapered sidewall of the second dielectric layer is covered by the bottom electrode, and an upper portion of the tapered sidewall of the second dielectric layer is free from coverage by the bottom electrode. The resistance switch element is over the bottom electrode. The top electrode is over the resistance switch element.
An integrated circuit, comprising:
An integrated circuit, comprising:
An integrated circuit, comprising:
Dependencies are inferred from the claim text.