Semiconductor structure and preparation method thereof

Abstract

A semiconductor structure and a preparation method thereof are provided. The semiconductor structure includes: a substrate; and a plurality of resistive devices disposed on the substrate; each of the resistive devices includes a lower electrode, a resistive layer and an upper electrode, the resistive layer covers a side wall and at least part of an upper surface of the lower electrode to isolate the lower electrode from the upper electrode, the upper electrode includes a first upper sub-electrode, a second upper sub-electrode and a third upper sub-electrode, the first upper sub-electrode and the second upper sub-electrode are disposed on two sides of the lower electrode respectively, and the third upper sub-electrode is disposed on the lower electrode.

Dependencies are inferred from the claim text.