Semiconductor device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsHitoshi KUNITAKE, Fumito ISAKA, Tatsuya ONUKI, Shunpei YAMAZAKI
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsHitoshi KUNITAKE, Fumito ISAKA, Tatsuya ONUKI, Shunpei YAMAZAKI
Estimating the term…
A semiconductor device that can be miniaturized or highly integrated is provided. The semiconductor device includes a first transistor that includes a first conductor, a first insulator, a first metal oxide, a second insulator, a second conductor, and a third conductor and a fourth conductor which cover parts of a top surface and parts of a side surface of the first metal oxide, which are stacked in this order from the bottom. A second transistor includes a fifth conductor, the first insulator, a second metal oxide, a third insulator, a sixth conductor, and a seventh conductor and a eighth conductor which cover parts of a top surface and parts of a side surface of the second metal oxide, which are stacked in this order from the bottom. A third transistor includes a ninth conductor, the first insulator, the second metal oxide, a fourth insulator, a tenth conductor, an eighth conductor, and an eleventh conductor covering part of the top surface and part of the side surface of the second metal oxide, which are stacked in this order from the bottom. One electrode of a capacitor including a material that can have ferroelectricity is electrically connected to the third conductor and the sixth conductor.
A semiconductor device comprising:
Dependencies are inferred from the claim text.