Vertical gate dram device
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsChao SUN, Ning JIANG, Wei LIU
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorsChao SUN, Ning JIANG, Wei LIU
Estimating the term…
A method of fabricating a semiconductor device can include providing a substrate, etching the substrate from a first side to form at least one vertical pillar having a first and a second end, forming at least one gate line on a gate dielectric layer formed on sidewalls of the at least one vertical pillar, forming a first p-type region at the first end of the at least one vertical pillar, forming a storage unit connecting the first p-type region, removing a portion of the substrate at a second side opposite to the first side of the substrate to expose the second end of the at least one vertical pillar, forming a second p-type region made of at least p-type SiGe at the second end of the at least one vertical pillar, and forming a bit line in connection with the second p-type region.
A method of fabricating a semiconductor device, comprising:
A semiconductor device, comprising:
A memory system, comprising:
Dependencies are inferred from the claim text.