Measuring device for adjusting a laser beam

An apparatus for generating EUV radiation, the apparatus comprising:

• a seed laser and an amplifier for generating a forward-traveling laser beam;
• a target for generating the EUV radiation, the target is capable of being irradiated by the forward-traveling laser beam;
• a spatial filter arranged upstream of the target with respect to the forward-traveling laser beam;
• an acousto-optical modulator for feeding through the forward-traveling laser beam and deflecting a backward-traveling laser beam, the acousto-optical modulator arranged downstream of the amplifier with respect to the forward-traveling laser beam and upstream of the spatial filter;
• and
• a measuring device configured to adjust the apparatus for the spatial filter with respect to the forward-traveling laser beam, the measuring device being configured to image a near-field plane and a far-field plane of the forward-traveling laser beam onto a common target, the measuring device comprising a first optical element and a second optical element, one of the first optical element and the second optical element being arranged in order to split a beam path of the forward-traveling laser beam into a near-field beam path and a far-field beam path, both of which being aligned with the common target.