Processing chamber with a rotatable pedestal hub
AssigneeApplied Materials, Inc.
InventorVijay D. Parkhe
Life of this patent
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Abstract
A processing chamber includes a pedestal hub including a plurality of arms each extending in a different direction. The pedestal hub is rotatable about one or more horizontal axes. The processing chamber further includes a first substrate support operatively coupled to a first arm and a first rotation of the pedestal hub causes the first substrate support to be available to support a substrate. The processing chamber further includes a second substrate support operatively coupled to a second arm and a second rotation of the pedestal hub causes the second substrate support to be available to support the substrate.
Claims20
A processing chamber comprising:
- a pedestal hub comprising a plurality of arms each extending in a different direction, wherein the pedestal hub is rotatable about one or more horizontal axes;
- a first substrate support coupled to a first arm of the plurality of arms, wherein a first rotation of the pedestal hub causes the first substrate support to be available to support a substrate;
- and
- a second substrate support operatively coupled to a second arm of the plurality of arms, wherein a second rotation of the pedestal hub causes the second substrate support to be available to support the substrate.
A method comprising
- heating a first substrate support mounted to a pedestal hub in a processing chamber to a first temperature;
- heating a second substrate support mounted to the pedestal hub to a second temperature;
- determining that the first temperature of the first substrate support corresponds to a target temperature for a substrate;
- rotating the pedestal hub so that the first substrate support is oriented to support the substrate;
- placing the substrate on the first substrate support;
- and
- processing the substrate while it is supported on the first substrate support.
A substrate support assembly comprising:
- a pedestal hub comprising a plurality of arms each extending in a different direction, wherein the pedestal hub is rotatable about a first horizontal axis;
- a first chuck operatively coupled to a first arm of the plurality of arms, wherein the first chuck is heated to a first temperature;
- and
- a second chuck operatively coupled to a second arm of the plurality of arms, wherein the second chuck is heated to a second temperature different from the first temperature.
Dependencies are inferred from the claim text.