Rating substrate support assemblies based on impedance circuit electron flow

A system comprising:

• a memory component configured to store a trained machine learning model;
• and
• a set of one or more processing devices coupled to the memory component, the set of one or more processing devices to:
• provide, as input to a trained machine learning model, data associated with a power testing process performed for a substrate support assembly;
• obtain, based on one or more outputs of the trained machine learning model, a measurement value for an electron flow across one or more components of the substrate support assembly in accordance with the power testing process;
• assign a first quality rating or a second quality rating to the substrate support assembly based on whether the measurement value satisfies an electron flow criterion, wherein the first quality rating indicates a higher quality than the second quality rating;
• and
• transmit, to a client device, an indication of whether the substrate support assembly is to be installed at a processing chamber in view of the assigned second quality rating.

A non-transitory computer readable medium comprising instructions that, when executed by a set of one or more processing devices, cause the set of one or more processing devices to:

• provide, as input to a trained machine learning model, data associated with a power testing process performed for a substrate support assembly;
• obtain, based on one or more outputs of the trained machine learning model, a measurement value for an electron flow across one or more components of the substrate support assembly in accordance with the power testing process;
• assign a first quality rating or a second quality rating to the substrate support assembly based on whether the measurement value satisfies an electron flow criterion, wherein the first quality rating indicates a higher quality than the second quality rating;
• and
• transmit, to a client device, an indication of whether the substrate support assembly is to be installed at a processing chamber in view of the assigned second quality rating.