Reflector for generating neutral beams and substrate processing apparatus including the same

A reflector for generating neutral beams, the reflector comprising:

• a plurality of reflective plates, wherein ion beams from an ion source collide against each of the plurality of reflective plates, the plurality of reflective plates reflecting the ion beams and converting the ion beams into neutral beams;
• and
• a coupling portion disposed between the plurality of reflective plates,
• wherein each of the plurality of reflective plates comprises a first surface, a second surface disposed on a first end of the first surface, and a third surface disposed on a second end of the first surface that is opposite to the first end, the coupling portion is disposed on the second and third surfaces of each of the plurality of reflective plates, the coupling portion has a ring structure as a whole.

A reflector for generating neutral beams, the reflector comprising:

• a plurality of reflective plates, wherein the ion beams from the ion source collide against each of the plurality of reflective plates;
• and
• a coupling portion disposed between the plurality of reflective plates, and
• wherein each of the plurality of reflective plates comprises a first surface, a second surface disposed on a first end of the first surface, and a third surface disposed on a second end of the first surface that is opposite to the first end, the coupling portion is disposed on the second and third surfaces of each of the plurality of reflective plates, the coupling portion has a ring structure as a whole, and a coating layer is disposed on the first surface of each of the plurality of reflective plates.