Optical apparatus and control method of optical apparatus
AssigneeLasertec Corporation
InventorKo GONDAIRA
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AssigneeLasertec Corporation
InventorKo GONDAIRA
Estimating the term…
An optical apparatus according to the present embodiment is an optical apparatus that illuminates an object with illumination light, the optical apparatus including: a first mirror unit configured to reflect a first portion of generated light including the illumination light generated from a light-emitting point; a second mirror unit configured to reflect a second portion of the generated light; an optical element configured to reflect the generated light; a first detection unit configured to detect the first portion reflected by the first mirror unit; and a second detection unit configured to detect the second portion reflected by the second mirror unit, in which the generated light includes the first portion, the second portion, and a main portion, and at least a part of the main portion reflected by the optical element is the illumination light that illuminates the object.
An optical apparatus that illuminates an object with illumination light, the optical apparatus comprising:
A control method of an optical apparatus that illuminates an object with illumination light,
Dependencies are inferred from the claim text.