Photoetching machine with optical fiber arrays
AssigneeWestlake University
InventorsXijun LI, Luqing SHAO
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AssigneeWestlake University
InventorsXijun LI, Luqing SHAO
Estimating the term…
A photoetching machine with optical fiber arrays is provided with a control device, an optical fiber transmission device, a light focusing array and an electric drive workpiece table, a photoetching light source, an de-excitation light source, a first-stage light splitting array, an electro-optical modulation array and a second-stage light splitting array; the control device is connected to the electro-optical modulation array and the electric drive workpiece table; the control device is used for controlling, on the basis of a design layout, the electro-optical modulation array to modulate laser emitted by a laser light source and controlling the electric drive workpiece table to move.
A photoetching machine with optical fiber arrays, comprising a control device, an optical fiber transmission device, a light focusing array and an electric drive workpiece table, a photoetching light source, a de-excitation light source, a first-stage light splitting array, an electro-optical modulation array and a second-stage light splitting array, wherein the photoetching light source and the de-excitation light source respectively emit an exposure Gaussian beam and a de-excitation Gaussian beam with different wavelengths, the control device is connected to the electro-optical modulation array and the electric drive workpiece table, and is used for controlling the electro-optical modulation array to modulate a laser emitted by the laser light source and controlling the electric drive workpiece table to move based on a design layout.
Dependencies are inferred from the claim text.