Semiconductor developer tool and methods of operation

A developer tool, comprising:

• a dispenser;
• one or more first nozzles of a first type on a central portion of the dispenser;
• one or more second nozzles of a second type on the central portion of the dispenser;
• and
• one or more third nozzles of the second type on a perimeter portion of the dispenser,
• wherein a first quantity of openings associated with the first type is greater than a second quantity of openings associated with the second type.

A method, comprising:

• dispensing, while a substrate is rotating on a chuck, a developer agent through one or more first nozzles of a first type onto a perimeter portion of the substrate;
• dispensing, while the substrate is rotating on the chuck, the developer agent through one or more second nozzles of the first type onto a central portion of the substrate;
• and
• dispensing, while the substrate is rotating on the chuck, the developer agent through one or more third nozzles of a second type onto the central portion of the substrate,
• wherein a first quantity of openings associated with the first type is fewer than a second quantity of openings associated with the second type.