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US 2025/0155807 A1Published application
Polypeptide, photoresist composition including the same, and method of forming pattern using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJinha KIM, Soonchun CHUNG, Jieun KIM, Joonsong PARK
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Abstract
A polypeptide, a photoresist composition including the polypeptide, and a method of forming patterns by using the photoresist composition.
Claims9
-12. (canceled)
A photoresist composition comprising a polypeptide and water;
- and
- the polypeptide comprising:
- a region A and a region B, wherein,
- the region A has an alanine content of 20% or more and includes at least one first repeat unit having 4 to 10 consecutive amino acid residues, and
- the region B has a tyrosine content of 10% or more, a content of 5% or more of at least one of serine, threonine, asparagine, or glutamine, and includes at least one second repeat unit having 4 to 10 consecutive amino acid residues.
2 more elements
Dependencies are inferred from the claim text.