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US 2025/0155796 A1Published application
Optical member and production method therefor
AssigneeNippon Light Metal Company, Ltd.
InventorsTakeshi OSHIMA, Norihito SUZUKI
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Abstract
A lightweight optical member can be manufactured at relatively low cost, the optical member having minimal distortion due to temperature increase and having excellent low dust generation and low outgassing properties. A pellicle frame is characterized by having a base material composed of titanium or a titanium alloy and a TiO2 coating layer formed on the surface of the base material. The TiO2 coating layer preferably contains nitrogen.
Claims8
An optical member, which comprises:
- a base material made of titanium or a titanium alloy, and
- a TiO2 coating layer formed on the surface of the base material.
A method for producing an optical member, comprising:
- a step for preparing a base material for an optical member, in which the base material made of titanium or a titanium alloy is processed into the shape of the base material for the optical member;
- and
- a coating step for forming a TiO2 coating layer on the surface of the base material for the optical member by a sol-gel method,
- wherein a nitrogen-containing salt catalyst is used in the coating step.
1 more element
Dependencies are inferred from the claim text.