High speed and durable scanning system with mirror

A high-speed flipping mirror system comprising components:

• a reflective mirror, linear motors, a flexure, a position sensor, a mirror mount, and a sensor mount:
• the linear motors:
• consist of four motors divided into two pairs, mounted perpendicularly to the mirror mount, all positioned on a circle, with each motor spaced 90 degrees apart, and each pair of motors symmetrically aligned across a bending direction of the flexure;
• when the motors move linearly in opposite pairs, they create an angular motion of the reflective mirror, referred to as the mirror flipping process;
• the flipping speed depends on the speed, travel distance, and acceleration of the motors;
• the flexure:
• is mounted with the mirror mount so that a vertical axis of the mirror mount and a center of the two-degree-of-freedom flexure are coincident;
• the flexure serves as a hinge structure with two rotational axes, playing a crucial role in ensuring the high-performance operation of the mirror flipping assembly;
• flipping the mirror at high speeds leads to requirements for load-bearing capacity, stiffness, and stress concentration at the flexure's rotational axes;
• the reflective mirror is mounted on the mirror mount and connected to the linear motor assembly and flexure, forming a two-degree-of-freedom flipping mirror system capable of flipping in two directions, the reflective mirror has a symmetrical shape, such as circular, oval, rectangular, or square, depending on the structure and installation space, and is machined to receive light from an optical lens in front and direct it to an image processing sensor behind, the reflective mirror is fixedly mounted to the mirror mount so that a center of the mirror and a center of the mirror mount are coincident;
• the high-resolution position sensor is used to determine a linear displacement of the reflective mirror's quadrants, thereby identifying the flipping angle of the mirror, which serves as feedback for a system to accurately control the mirror's position along a desired path, the position sensor is fixedly mounted on the sensor mount, with the sensor's surface positioned at an equal fixed distance from the mirror surface at four points, the position sensor operates on the eddy current principle, providing very high accuracy feedback on the mirror's position with accuracy up to micro radians;
• the mirror flipping control system, based on user requirements and the position feedback signal from the position sensor, applies a control voltage to the linear motor assembly at a high frequency, in conditions where the system's rotation angle is limited by the mechanical structure, the flipping mirror system is required to flip quickly during the exposure time, with very high accuracy, to achieve this, the flipping mirror system operates according to the following cycle:
• the mirror is controlled to rotate to one side relative to the system's zero point;
• before the sensor begins an exposure time, the mirror gradually accelerates to a required speed;
• then, the mirror flips at the required speed before the sensor's exposure and maintains this speed throughout the exposure time;
• afterward, it returns to the starting point after the sensor's exposure, and the mirror is controlled to rotate back to its initial offset position, ready for the next flipping cycle.