Magnetic sensor
AssigneeTDK Corporation
InventorsHidekazu KOJIMA, Hiromichi Umehara
Life of this patent
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Abstract
A magnetic sensor includes a substrate including a top surface; an insulating layer disposed on the substrate, the insulating layer including first and second inclined surfaces each inclined with respect to the top surface of the substrate; and an MR element structure. An MR element is disposed on the first inclined surface or the second inclined surface. The MR element includes a bottom surface facing the first inclined surface or the second inclined surface, a top surface, and a first surface connecting the bottom surface and the top surface and including two steps.
Claims15
A magnetic sensor comprising:
- a support member including an inclined surface inclined with respect to a reference plane;
- and
- a magnetic detection element structure including:
- a bottom surface, at least a part of which faces the inclined surface;
- a top surface on a side opposite to the bottom surface;
- a first surface connecting the bottom surface and the top surface and including a plurality of steps;
- a lower electrode including the bottom surface;
- and
- a magnetic detection element disposed on the lower electrode and including at least a part of the top surface, wherein:
- the lower electrode includes a first side surface that forms a part of the first surface;
- and
- the first side surface is inclined with respect to a direction perpendicular to the inclined surface.
A magnetic sensor comprising:
- a support member including an inclined surface inclined with respect to a reference plane;
- and
- a magnetic detection element structure including:
- a bottom surface, at least a part of which faces the inclined surface;
- a top surface on a side opposite to the bottom surface;
- a first surface connecting the bottom surface and the top surface and including one or more steps;
- a second surface connecting the bottom surface and the top surface on a side of a direction away from the first surface along the inclined surface;
- an electrode including the bottom surface;
- and
- a magnetic detection element electrically connected to the electrode and including at least a part of the top surface, wherein:
- the electrode includes a first side surface that forms a part of the first surface;
- the first side surface is inclined with respect to a direction perpendicular to the inclined surface;
- and
- the second surface includes no step or includes fewer steps than the first surface.
Dependencies are inferred from the claim text.