Apparatus for testing semiconductor device test

An apparatus for testing semiconductor device comprising:

• a thermoelectric element module having both opposing surfaces switched to a heating surface or a cooling surface according to a flow direction of current flowing in the thermoelectric element module;
• a cooling module disposed on top of the thermoelectric element module and configured to cool the thermoelectric element;
• a pusher module disposed under the thermoelectric element module and contacting a test target device mounted on a holder to heat or cool the test target device;
• and
• a control module configured to control the flow direction of the current to be supplied to the thermoelectric element module based on a target temperature value,
• wherein the thermoelectric element module includes:
• an upper substrate in contact with the cooling module;
• a lower substrate in contact with the pusher module;
• an intermediate substrate disposed between the upper substrate and the lower substrate;
• a plurality of first semiconductor elements and a plurality of second semiconductor elements disposed between the upper substrate and the intermediate substrate;
• and
• a plurality of third semiconductor elements and a plurality of fourth semiconductor elements disposed between the intermediate substrate and the lower substrate,
• wherein a temperature sensor is disposed at one side of the intermediate substrate or inside the intermediate substrate,
• wherein the control module is configured to control the flow direction of the current to be supplied to the thermoelectric element module, based on a temperature value of the intermediate substrate measured by the temperature sensor.