Object Manipulator for an X-ray Inspection System

Abstract

An object manipulator for an X-ray inspection system is disclosed. The object manipulator has an object stage on which a test object can be secured, a first linear guide along which the object stage can be moved in a first direction, and a second linear guide along which the object stage can be moved in a second direction. The second direction has a perpendicular component relative to the first direction, particularly being perpendicular thereto, an object stage interface being formed on the first linear guide. The object stage has an interface region in which it is detachably connected to the object stage interface via a connecting device. The object stage has a support region in which it is arranged on the first linear guide to be positionally movable thereon and which is spatially separate from the interface region, in particular at its end facing away from the interface region.

Dependencies are inferred from the claim text.