Temperature compensation apparatus, measurement system, and temperature compensation method

A temperature compensation apparatus which performs temperature compensation on a measurement result of an object to be measured, output by a three-dimensional measurement apparatus installed in a variable temperature environment, the temperature compensation apparatus comprising:

• a measured temperature acquisition part that acquires temperatures of the three-dimensional measurement apparatus during measurement, from a plurality of temperature sensors provided at a plurality of different positions of the three-dimensional measurement apparatus, a temperature sensor that measures an environmental temperature of the three-dimensional measurement apparatus, and a temperature sensor that measures a temperature of the object to be measured;
• a measurement result acquisition part that acquires the measurement result of the object to be measured output by the three-dimensional measurement apparatus;
• a correction value calculation part that calculates a correction value of the measurement result using a model formula of temperature compensation, including a polynomial composed of values obtained by multiplying each of a plurality of temperatures acquired from the plurality of temperature sensors by coefficients corresponding to each of the plurality of temperature sensors;
• and
• a correction part that calculates a corrected measurement value, which is a corrected measurement result obtained by adding the correction value to the measurement result or multiplying the correction value by the measurement result, wherein the coefficients corresponding to each of the plurality of temperature sensors are values identified so as to minimize an evaluation function based on a difference between an ideal measurement value obtained by measuring the object to be measured installed in a constant temperature environment at a predetermined temperature and the correction value.