Back to results
US 2025/0154653 A1Published application
Substrate-carrier structure
AssigneeSgl Carbon SE
InventorsShane BRAUN, Jonathan KUNTZ, Joshua AUMAN, Joseph WENDEL, Austin MOHNEY, Tom GOETZ
Life of this patent
Estimating the term…
Abstract
A substrate carrier structure wherein the substrate may be a wafer and its use in nanoscale processes, such as deposition and/or growth processes. The carrier structure comprises grooves on its frontside and or backside.
Claims10
Substrate-carrier structure, wherein the backside and/or frontside of the carrier structure comprises at least one groove.
Dependencies are inferred from the claim text.