Method and device for producing a silicon carbide containing workpiece
AssigneeThe Yellow SiC Holding GmbH
InventorSiegmund GREULICH-WEBER
Life of this patent
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Abstract
Disclosed are a method and an apparatus for producing a silicon carbide-containing workpiece, in which: a blank (2) is held in a heated reactor (1), a gas composition is fed into the reactor (1), the gas composition serving as a precursor for silicon carbide production and containing gaseous tetrachlorosilane as a silicon source and a hydrocarbon gas as a carbon source, and the silicon carbide-containing workpiece is produced from the blank (2) under the action of the gas composition.
Claims7
A method for producing a silicon carbide-containing workpiece, comprising:
- holding a blank (2) in a heated reactor (1),
- feeding a gas composition into the reactor (1), said gas composition serving as a precursor for silicon carbide production and containing gaseous tetrachlorosilane as a silicon source and a hydrocarbon gas as a carbon source, and
- producing the silicon carbide-containing workpiece from the blank (2) under the action of the gas composition.
An apparatus for producing a silicon carbide-containing workpiece, comprising:
- a heatable reactor (1) which is configured to maintain a carbon-containing blank (2) at a temperature which permits its transformation into the silicon carbide-containing workpiece, and
- a source (5), connected to the reactor (1), of a gas composition serving as a precursor for silicon carbide production and containing gaseous tetrachlorosilane as a silicon source and hydrocarbon gas as a carbon source.
Dependencies are inferred from the claim text.