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US 2025/0153349 A1Published application
Substrate-conveying robot
AssigneeKawasaki Jukogyo Kabushiki Kaisha
InventorsTakeshi SHIBATA, Ryota ONO, Junichi MATSUOKA
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Abstract
A substrate-conveying robot (100) includes a wrist joint (JT3) including a first bearing(s) (42) rotatably supporting a first rotation shaft (41) for rotating a first substrate-holding hand (21), and a second bearing(s) (44) rotatably supporting a second rotation shaft (43) for rotating the second substrate-holding hand (22). The first and second bearings are ball bearings.
Claims14
A substrate-conveying robot comprising:
- a horizontal multi-joint robot arm;
- and
- a substrate-holding hand arranged in a distal end part of the robot arm, wherein
- the substrate-holding hand includes a first substrate-holding hand, and a second substrate-holding hand arranged on or above the first substrate-holding hand and operating independently of the first substrate-holding hand,
- the robot arm includes a wrist joint for driving the first substrate-holding hand and the second substrate-holding hand,
- the wrist joint includes a first bearing(s) rotatably supporting a first rotation shaft for rotating the first substrate-holding hand, and a second bearing(s) rotatably supporting a second rotation shaft for rotating the second substrate-holding hand, and
- the first bearing(s) and the second bearing(s) are ball bearings.
4 more elements
A substrate-conveying robot comprising:
- a horizontal multi-joint robot arm;
- and
- a substrate-holding hand arranged in a distal end part of the robot arm, wherein
- the robot arm includes a first arm part, a second arm part including one end connected to the first arm part and another end to which the substrate-holding hand is connected, and an arm part joint for driving the second arm part,
- the arm part joint includes an arm part rotation shaft bearing(s) rotatably supporting an arm part rotation shaft for rotating the second arm part, and
- the arm part rotation shaft bearing(s) is/are arranged astride the first arm part and the second arm part in a height direction.
3 more elements
Dependencies are inferred from the claim text.