Double-sided conditioner
AssigneeDiamondfacing Nanotechnology & Associate Co.
InventorCHIA-PEI CHEN
Life of this patent
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Abstract
A double-sided conditioner includes a carrier, a plurality of polishing components, and a binding material. The carrier includes an upper surface, a lower surface opposite to the upper surface, and a plurality of opening structures that are arranged at intervals around a carrier center. The polishing components are respectively disposed in the opening structures of the carrier. Each of the polishing components has a first polishing surface exposed from the upper surface of the carrier and a second polishing surface exposed from the lower surface of the carrier. The binding material is filled into the opening structures, so as to fix in position the polishing components.
Claims14
A double-sided conditioner, comprising:
- a carrier having an upper surface and a lower surface opposite to the upper surface, wherein the carrier includes a carrier center and a plurality of opening structures that are arranged at intervals around the carrier center;
- a plurality of polishing components respectively disposed in the opening structures, wherein each of the polishing components has a first polishing surface exposed from the upper surface and a second polishing surface exposed from the lower surface;
- and
- a binding material filled into the opening structures, so as to fix in position the polishing components.
Dependencies are inferred from the claim text.