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US 2025/0149464 A1Published application
Semiconductor device and method for manufacturing the same
AssigneeKioxia Corporation
InventorsYoichi MIZUTA, Takahiro TSURUDO, Yoshiaki TAKAHASHI, Kenichi MATOBA, Yoshifumi SHIMAMURA, Toru OZAWA, Takumi KOSAKI, Kouji NAKAO
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Abstract
According to one embodiment, a semiconductor device includes a circuit pattern including a plurality of unit patterns that are disposed in a repeating manner in at least one direction. The semiconductor device includes a discrimination pattern provided in the circuit pattern and configured to discriminate the unit patterns from each other.
Claims15
1-20. (canceled)
A semiconductor device comprising:
- a circuit pattern including a plurality of unit patterns that are disposed in a repeating manner along a first direction;
- and
- a discrimination pattern provided in a blank region located adjacent one of the unit patterns and configured to discriminate the unit patterns from each other;
- wherein the discrimination pattern includes a plurality of discrimination figures, each of the plurality of discrimination figures corresponding to a respective one of the plurality of unit patterns and being different from the other discrimination figures;
- wherein the blank region extends in a second direction different from the first direction;
- and
- wherein each of the discrimination figures have a rectangular shape with a respective length different from the other discrimination figures.
4 more elements
Dependencies are inferred from the claim text.