Package structure and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Hao Chen, Po-Yuan Cheng, Pu Wang, Li-Hui Cheng
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Hao Chen, Po-Yuan Cheng, Pu Wang, Li-Hui Cheng
Estimating the term…
A manufacturing method of a package structure includes: forming a first package component, where the first package component includes a first insulating encapsulation laterally covering semiconductor dies and a redistribution structure formed on the first insulating encapsulation and the semiconductor dies; coupling the first package component to a second package component; forming an underfill layer between the first and second package component, where the underfill layer extends to cover a sidewall of the first package component; forming a metallic layer on opposing surfaces of the semiconductor dies and the first insulating encapsulation by using a jig, where a window of the jig accessibly exposes the opposing surfaces of the semiconductor dies and the first insulating encapsulation, and a peripheral region of the opposing surface of the first insulating encapsulation is shielded by the jig.
A manufacturing method of a package structure, comprising:
A manufacturing method of a package structure, comprising:
A manufacturing method of a package structure, comprising:
Dependencies are inferred from the claim text.