Electrostatic chuck unit, lamination apparatus and method of lamination

A lamination apparatus comprising:

• a first chamber;
• a second chamber adjacent to the first chamber in a first direction;
• a first electrostatic chuck disposed in the first chamber;
• and
• a second electrostatic chuck disposed in the second chamber,
• wherein the first electrostatic chuck includes:
• a first plate that includes a surface that is concavely curved in a second direction opposite to the first direction;
• and
• a first electrode pattern disposed on the surface of the first plate;
• wherein the second electrostatic chuck includes:
• a second plate that includes a surface adjacent to the first electrostatic chuck and that is convexly curved in the second direction;
• and
• a second electrode pattern disposed on the surface of the second plate,
• wherein each of the first electrode pattern and the second electrode pattern includes an electrode, and
• a width of the electrode is between 10 mm and 30 mm.

A method of lamination, the method comprising:

• molding a shape of a display panel;
• adsorbing the display panel to a surface of a first electrostatic chuck;
• adsorbing a window to a surface of a second electrostatic chuck adjacent to the first electrostatic chuck, wherein the second electrostatic chuck is spaced apart from the first electrostatic chuck in a first direction;
• and
• bonding the display panel and the window by using the first electrostatic chuck and the second electrostatic chuck.