Wafer holding device having function of positioning wafer

A wafer holding device having function of positioning a wafer, configured to fix the wafer thereon and position the wafer, wherein the wafer is provided with a positioning structure;

• comprising:
• a base;
• a holder plate, disposed on the base;
• wherein the holder plate includes an upper surface and a lower surface;
• the upper surface is provided for the wafer to be placed thereon;
• and the upper surface is provided with an adsorption structure for adsorbing and fixing the wafer;
• a plurality of pushing pins, disposed on the upper surface in a protruding manner;
• wherein each of the pushing pins is disposed on the holder plate at intervals around the holder plate with respect to a predetermined datum center on the holder plate;
• a linear actuator, disposed on the base;
• wherein an actuating direction of the linear actuator is in parallel to the upper surface;
• and
• a positioning member, configured to be driven by the linear actuator to move in the actuating direction to contact and push against the positioning structure of the wafer.