Protective member forming apparatus

A protective member forming apparatus configured to spread a liquid resin on an entire surface of a wafer on one side, cure the liquid resin and form a protective member to protect the entire surface of the wafer on the one side, comprising:

• a sheet holder configured to hold a sheet;
• a wafer holder configured to locate the wafer to face the sheet holder and hold the wafer thereat;
• a liquid resin feeding nozzle configured to feed the liquid resin onto the sheet held by the sheet holder or onto the wafer held by the wafer holder;
• a lift/lower device configured to lift or lower the sheet holder and the wafer holder relatively;
• a first emitter configured to emit electromagnetic waves to the liquid resin and cure the liquid resin;
• and
• a second emitter configured to emit UV rays or plasma at a surface of the sheet held by the sheet holder and improve wettability of the surface of the sheet.