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US 2025/0149329 A1Published application
Subtrate processing method and substrate processing apparatus
AssigneeTokyo Electron Limited
InventorsRyota IFUKU, Takashi MATSUMOTO, Hiroki YAMADA
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Abstract
A substrate processing method includes: a preparation process of preparing a substrate having an underlying layer; a first process of forming a first graphene film, which has a first stress, on the underlying layer; a second process of forming a second graphene film, which has a second stress different from the first stress, on the first graphene film; and a third process of forming a third graphene film, which has a third stress different from the second stress, on the second graphene film.
Claims19
A substrate processing method comprising:
- a preparation process of preparing a substrate having an underlying layer;
- a first process of forming a first graphene film, which has a first stress, on the underlying layer;
- a second process of forming a second graphene film, which has a second stress different from the first stress, on the first graphene film;
- and
- a third process of forming a third graphene film, which has a third stress different from the second stress, on the second graphene film.
2 more elements
A substrate processing apparatus comprising:
- a processing container capable of accommodating a substrate having an underlying layer;
- and
- a controller,
- wherein the controller is configured to control the substrate processing apparatus to prepare the substrate,
- wherein the controller is configured to control the substrate processing apparatus to form a first graphene film, which has a first stress, on the underlying layer,
- wherein the controller is configured to control the substrate processing apparatus to form a second graphene film, which has a second stress different from the first stress, on the first graphene film, and
- wherein the controller is configured to control the substrate processing apparatus to form a third graphene film, which has a third stress different from the second stress, on the second graphene film.
4 more elements
Dependencies are inferred from the claim text.