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US 2025/0149304 A1Published application
System for controlling a slope and location of an upper electrode
AssigneeVM Inc.
InventorsSang Woo LEE, Woo Hyung CHOI, Tae Jin KWON
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Abstract
A system for controlling a slope and a location of an upper electrode comprises an upper electrode module 11 disposed to face a lower electrode 13 of a process chamber C; a lid 12 coupled to an upper part of the process chamber C; at least three motors 14a, 14b disposed at an upper surface of the lid 12; and a connecting means for connecting the at least three motors 14a, 14b to the upper electrode module 11 respectively.
Claims10
A system for controlling a slope and a location of an upper electrode, comprising:
- an upper electrode module disposed to face a lower electrode of a process chamber C;
- a lid coupled to an upper part of the process chamber;
- at least three motors disposed at an upper surface of the lid;
- and
- connecting means for connecting the at least three motors to the upper electrode module respectively.
2 more elements
Dependencies are inferred from the claim text.