Method and device with in-fab wafer yield prediction

A device for predicting a yield of an in-fabrication wafer, the device comprising:

• one or more processors and a memory,
• wherein the memory stores instructions configured to cause the one or more processors to perform a process comprising:
• generating a virtual process path comprised of data on a residual process of the in-fabrication wafer, wherein the residual process is an uncompleted portion of a process of fabricating the in-fabrication wafer;
• and
• predicting the yield of the in-fabrication wafer by using a yield predicting model, the yield predicting model predicting the yield based on the virtual process path.

A non-volatile computer-readable medium storing information configured to cause one or more processors to perform a process for determining a yield associated with an in-fabrication wafer, the in-fabrication wafer fabricated with fabrication steps of a fabrication process, the process comprising:

• receiving first fabrication data of the in-fabrication wafer, the first fabrication data comprising information about first steps of the fabrication process that have been completed for the in-fabrication wafer, wherein second steps of the fabrication process have not been completed for the in-fabrication wafer;
• determining second fabrication data of the in-fabrication wafer, the second fabrication data comprising information about the second steps of the fabrication process that have been not completed for the in-fabrication wafer;
• and
• predicting the yield of the in-fabrication wafer based on the first fabrication data and the second fabrication data.