Control parameter calculation apparatus, control parameter calculation method, and control parameter calculation program
AssigneeHORIBA STEC, Co., Ltd.
InventorsSeiji HIGUCHI, Kotaro TAKIJIRI
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AssigneeHORIBA STEC, Co., Ltd.
InventorsSeiji HIGUCHI, Kotaro TAKIJIRI
Estimating the term…
A control parameter calculation apparatus calculates a control parameter of a fluid control apparatus that controls a fluid. The control parameter calculation apparatus stores correlation data indicating a correlation of a reference control parameter of the fluid control apparatus and a reference response signal output by using the reference control parameter, acquires a target response signal output by using a target control parameter of the fluid control apparatus different from the fluid control apparatus serving as a reference, acquires the correlation data and the target response signal and calculates a correlation control parameter corresponding to the target response signal in the fluid control apparatus serving as a reference by using the correlation data, and calculates an adjustment amount of the target control parameter based on the correlation control parameter and the reference control parameter.
A control parameter calculation apparatus that calculates a control parameter of a fluid control apparatus that controls a fluid, the control parameter calculation apparatus comprising:
A control parameter calculation method for calculating a control parameter of a fluid control apparatus that controls a fluid, the control parameter calculation method comprising:
A non-transitory storage medium storing a control parameter calculation program that is used for a fluid control apparatus that controls a fluid, the control parameter calculation program calculating a control parameter of the fluid control apparatus, the control parameter calculation program being executable by a computer to:
Dependencies are inferred from the claim text.