Method for manufacturing master, method for manufacturing transferred object, method for manufacturing replica master, and apparatus for manufacturing master

An apparatus for manufacturing a master, comprising:

• a deposition device that forms a resist layer on an outer circumferential surface of a base member having a cylindrical shape or a columnar shape;
• an exposure control device that divides an input image in which at least one object having a three-dimensional shape is two-dimensionally drawn into a plurality of small regions, makes a determination as to whether or not to radiate laser light to each of the small regions based on whether or not the object is included in each of the small regions, makes a determination in a stepwise manner as to an intensity of the laser light to be radiated to each of the small regions based on a contrasting density of a partial image of the object in each of the small regions in which the object is included, and generates an exposure control signal corresponding to the object based on a result of the determination of the intensity of the laser light;
• an exposure device that radiates, to the resist layer, the laser light modulated in the intensity in accordance with the contrasting density of the partial image of the object for each of the small regions based on the exposure control signal, thereby forming a resist pattern corresponding to the object on the resist layer;
• and
• an etching device that forms a concave-convex pattern corresponding to the three-dimensional shape of the object on the outer circumferential surface of the base member using, as a mask, the resist layer on which the resist pattern has been formed, wherein
• in the resist pattern, the resist pattern changes in depth in each of the small regions in accordance with the contrasting density of the partial image of the object.