Polymer, Positive And Negative Photosensitive Resin Compositions, Patterning Process, Method For Forming Cured Film, Interlayer Insulating Film, Surface Protective Film, And Electronic Component
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHiroyuki URANO, Masashi IIO, Osamu WATANABE, Katsuya TAKEMURA
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