Method for inspecting reflecting device

Abstract

A method for inspecting a reflecting device, which has a plurality of reflecting elements arrayed in a matrix, each of the plurality of reflecting elements comprises a patch electrode, a common electrode on a back side of the patch electrode, and a liquid crystal layer between the patch electrode and the common electrode, a first voltage V1 is applied between one of the plurality of patch electrodes and the common electrode, and whether the reflecting element is good or bad is determined based on changes in a frame region that appears around a periphery of one of the plurality of patch electrodes in a top view when a voltage is applied between one of the plurality of patch electrodes and the common electrode.

Dependencies are inferred from the claim text.