Mems mirror system with slow light beam deflection using fast resonant oscillations about at least two resonant axes

A light beam deflection system having an output deflection angle that changes over time, the light beam deflection system comprising:

• a microelectromechanical system (MEMS) device comprising:
• an outer rotationally fixed frame;
• an inner oscillating frame that is suspended from the outer rotationally fixed frame, wherein the inner oscillating frame is a resonant structure configured to oscillate about a first rotation axis relative to the outer rotationally fixed frame;
• and
• a resonant mirror that is suspended from the inner oscillating frame, wherein the resonant mirror is configured to oscillate about a second rotation axis relative to the inner oscillating frame,
• wherein the first rotation axis is co-incident with the second rotation axis.

A light beam deflection system having an output deflection angle that changes over time, the light beam deflection system comprising:

• a first resonant structure configured to oscillate about a first rotation axis at first resonant frequency;
• and
• a second resonant structure configured to oscillate about a second rotation axis at a second resonant frequency,
• wherein the first rotation axis is parallel to the second rotation axis, and
• wherein the output deflection angle is configured to oscillate according to a beat pattern of a beat wave defined by a frequency difference between the first resonant frequency and the second resonant frequency.