Optical processing apparatus

An optical processing apparatus comprising:

• a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength that is longer than the first wavelength;
• a condensing optical system that has a positive refractive power and that condenses each of the first light beam and the second light beam from the combining element on a processing target object;
• and
• a correction optical system that has a positive refractive power,
• wherein
• the correction optical system is disposed on the first optical path at an entrance side of the combining element,
• a back focus of the condensing optical system at the first wavelength is longer than a back focus of the condensing optical system at the second wavelength,
• one light beam of the first light beam and the second light beam is a light beam for processing the processing target object,
• other light beam of the first light beam and the second light beam is a light beam for measuring the processing target object.

An optical processing apparatus comprising:

• a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength that is longer than the first wavelength;
• a condensing optical system that has a positive refractive power and that condenses each of the first light beam and the second light beam from the combining element on a processing target object;
• and
• a correction optical system that has a positive refractive power,
• wherein
• the correction optical system is disposed on the second optical path at an entrance side of the combining element,
• one light beam of the first light beam and the second light beam is a light beam for processing the processing target object,
• other light beam of the first light beam and the second light beam is a light beam for measuring the processing target object.

An optical processing apparatus comprising:

• a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength that is longer than the first wavelength;
• a condensing optical system that has a positive refractive power and that condenses each of the first light beam and the second light beam from the combining element on a processing target object;
• and
• a correction optical system that has a negative refractive power,
• wherein
• the correction optical system is disposed on the second optical path at an entrance side of the combining element,
• a back focus of the condensing optical system at the first wavelength is longer than a back focus of the condensing optical system at the second wavelength,
• one light beam of the first light beam and the second light beam is a light beam for processing the processing target object,
• other light beam of the first light beam and the second light beam is a light beam for measuring the processing target object.