X-ray measurement system with high signal resolution

An X-ray measurement system with high signal resolution, the X-ray measurement system comprising:

• an X-ray generator configured to generate an incident X-ray beam;
• an X-ray optical element group configured to guide the incident X-ray beam to a to-be-measured sample;
• a multi-dimensional X-ray detector configured to receive a measurement X-ray beam generated by irradiating the incident X-ray beam on the to-be-measured sample, wherein the multi-dimensional X-ray detector includes:
• an insulating layer;
• a plurality of first electrode layers disposed on the insulating layer;
• a photodiode layer disposed on the insulating layer;
• an X-ray conversion material layer disposed on the photodiode layer, wherein the X-ray conversion material layer is made of amorphous selenium;
• and
• a second electrode layer disposed on the X-ray conversion material layer;
• and
• a processing device connected to the multi-dimensional X-ray detector, wherein the processing device is configured to collect a to-be-measured X-ray signal generated by the multi-dimensional X-ray detector that receives the measurement X-ray beam, and generate a plurality of measurement results corresponding to a plurality of structural parameters of the to-be-measured sample, wherein the plurality of measurement results include a plurality of mode signals of different orders.