Probe card and method for design probe card and measuring method and system for detecting device under test using the probe card

A probe card, suitable for conducting a wafer acceptance test on a wafer, the probe card comprising:

• a circuit board;
• a cantilever-type space transformer, electrically connected to the circuit board;
• and
• a vertical probe head, electrically connected to the cantilever-type space transformer, the vertical probe head comprising:
• a probe base, comprising an upper guide plate unit and a lower guide plate unit, wherein the upper guide plate unit comprises at least one upper guide plate and an upper guide hole penetrating through the at least one upper guide plate, the lower guide plate unit comprises at least one lower guide plate and a lower guide hole penetrating through the at least one lower guide plate, and the upper guide plate unit and the lower guide plate unit respectively have an upper surface and a bottom surface, wherein an accommodating space is formed between the lower surface of the upper guide plate unit and the upper surface of the lower guide plate unit;
• and
• a vertical probe, comprising a probe tail, a probe body, and a probe tip, wherein the probe tail passes through the at least one upper guide hole, the probe body is positioned within the accommodating space, and the probe tip passes through the at least one lower guide hole;
• wherein the cantilever-type space transformer comprises a mounting base and a cantilever converting probe, the cantilever converting probe comprises a fixed segment and an exposed segment, the fixed segment is secured to the mounting base, the exposed segment is outside the mounting base, and the fixed segment enters from a lateral side of the mounting base and forms a contact on the bottom surface of the mounting base.