Detection device

Abstract

A detection device includes a vibrator having a sensitive membrane, a heater configured to heat the sensitive membrane, a detector configured to detect a detection value related to a resonance frequency of the vibrator, a control unit configured to cause the heater to start heating the sensitive membrane, acquire a first detection value detected by the detector in a state where the sensitive membrane is heated, and cause the heater to stop heating the sensitive membrane based on the first detection value and a first reference value, and an arithmetic unit configured to acquire a second detection value related to a gas to be measured detected by the detector after heating of the sensitive membrane is stopped, and calculate determination information about the gas based on the second detection value.

Dependencies are inferred from the claim text.