Graphene sensors and a method of manufacture

A graphene sensor comprising:

• a graphene layer structure provided on a non-metallic surface of a substrate, the graphene layer structure having an exposed sample surface for receiving a sample for testing;
• first and second electrical contacts provided in contact with the graphene layer structure, and arranged on opposite sides of the sample surface;
• wherein each electrical contact is separated from the sample surface by an adjacent metal oxide layer, and wherein each electrical contact and adjacent metal oxide layer are capped with a passivating layer;
• and
• wherein the sample surface is devoid of photoresist.

A container for storage and shipping, containing a plurality of precursors for the manufacture of a graphene sensor, wherein each precursor comprises:

• a graphene layer structure provided on a non-metallic surface of a substrate, wherein the graphene layer structure is formed on the non-metallic surface of the substrate by CVD;
• first and second electrical contacts in contact with the graphene layer structure, and arranged on opposite sides of the precursor;
• a metal oxide layer on and across the graphene layer structure, in contact with and between the first and second electrical contacts;
• and
• a passivating layer provided on the metal oxide layer and on and across the first and second electrical contacts, defining an uncoated window of exposed metal oxide layer, the window arranged between the first and second electrical contacts.

A method for the manufacture of a graphene sensor, the method comprising:

• (i) providing a precursor comprising:
• a graphene layer structure on a non-metallic surface of a substrate, wherein the graphene layer structure is formed on the non-metallic surface of the substrate by CVD;
• first and second electrical contacts in contact with the graphene layer structure, and arranged on opposite sides of the precursor;
• a metal oxide layer on and across the graphene layer structure, in contact with and between the first and second electrical contacts;
• and
• a passivating layer provided on the metal oxide layer and on and across the first and second electrical contacts, defining an uncoated window of exposed metal oxide layer, the window arranged between the first and second electrical contacts;
• (ii) etching the uncoated window of exposed metal oxide layer to form a graphene sensor having an exposed sample surface of the graphene layer structure for receiving a sample for testing;
• and optionally
• (iii) functionalising the exposed sample surface to form a graphene sensor having a functionalised sample surface for receiving a sample for testing.