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AssigneeKLA Corporation
InventorsDaniel James Haxton, Christopher Liman, InKyo Kim, Boxue Chen, Hyowon Park, Thaddeus Gerard Dziura, Nakyoon Kim, Houssam Chouaib, Anderson Chou, Dimitry Sanko
Estimating the term…
Methods and systems for determining random variation in one or more structures on a specimen are provided. One method includes determining characteristic(s) of output generated by an output acquisition subsystem for structure(s) formed on a specimen and simulating the characteristic(s) of the output with initial parameter values for the structure(s). The method also includes determining parameter values of the structure(s) formed on the specimen as the initial parameter values that resulted in the simulated characteristic(s) that best match the determined characteristic(s). The determined parameter values are responsive to random variation in parameter(s) of the structure(s) on the specimen.
A system configured for determining random variation in one or more structures formed on a specimen, comprising:
A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for determining random variation in one or more structures on a specimen, wherein the computer-implemented method comprises:
A computer-implemented method for determining random variation in one or more structures on a specimen, comprising:
A system configured for determining random variation in one or more structures formed on a specimen, comprising:
-37. (canceled)
Dependencies are inferred from the claim text.