Drive and sense balanced gyroscope with enhanced vibration rejection

A method of operating a microelectromechanical system (MEMS) gyroscope, comprising:

• providing a drive system comprising a first drive mass and a second drive mass, wherein the first drive mass is driven in a first direction along a first axis, and the second drive mass is driven parallel to the first axis in anti-phase to the first drive mass;
• coupling at least one in-plane proof mass to the first drive mass and the second drive mass, wherein the at least one in-plane proof mass is driven in a second direction different from the first direction;
• coupling a first out-of-plane proof mass to the first drive mass such that the first out-of-plan proof mass is driven in a first drive motion in the first direction and is responsive to an angular velocity about an out-of-plane axis to cause a first in-plane Coriolis force perpendicular to the first drive motion;
• coupling a second out-of-plane proof mass to the second drive mass such that the second out-of-plane proof mass is driven in a second drive motion in anti-phase to the first drive motion, wherein the second out-of-plane proof mass is responsive to the angular velocity about an out-of-plane axis to cause a second in-plane Coriolis force in anti-phase to the first in-plane Coriolis force;
• and
• coupling the first out-of-plane proof mass and the second out-of-plane proof mass with a coupling link configured to cause the first out-of-plane proof mass and the second out-of-plane proof mass to reject a linear vibration and a rotational vibration.