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US 2025/0146819 A1Published application
Silicon-based piezoelectric inertial sensor unit
AssigneeTechnoSensors Inc.
InventorsGaston Dubé, Alfredo Rivière
Life of this patent
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Abstract
A planar inertial measurement sensor unit (IMU) is disclosed. The IMU includes an E-shape structure using piezoelectric resonators to measure the Coriolis effect during rotation and inertial force during linear acceleration. The IMU may be microfabricated using thin films on silicon technology, which may be vacuum packed in less than 4 mm3 at wafer-level chip-scale using double eutectic seals and which may integrate vibration energy harvesting technology.
Claims23
A micro-structured inertial measurement sensor (IMS) comprising:
- a peripheral frame;
- one or more mechanical elements supported at least partly by the peripheral frame, wherein the one or more mechanical elements are planar in structure, at least partly piezoelectric, and configured to generate movement indicative of rate of rotation and of acceleration;
- and
- one or more sensing elements configured to generate a plurality of signals indicative of the rate of rotation and of the acceleration.
1 more element
Dependencies are inferred from the claim text.