Post-treatment of lithium tantalate single crystal and method for manufacturing lithium tantalate single crystal substrate using the same

Abstract

Disclosed is a post-treatment method of a piezoelectric oxide single crystal substrate for suppressing pyroelectric properties of the substrate, and a method for manufacturing a lithium tantalate single crystal substrate using the same. According to one aspect of the present disclosure, there is provided a post-treatment method of a piezoelectric oxide single crystal substrate, the method including: loading at least one reducing agent and the single crystal substrate into a treatment device; and performing reduction treatment by heat treating the substrate while maintaining the inside of the treatment device in a preset environment, wherein the preset environment means that heat treatment is performed at a temperature of 200° C. to 400° C. under normal pressure.

Dependencies are inferred from the claim text.