Film forming apparatus for metal film

A film forming apparatus for a metal film that forms the metal film in a predetermined pattern on a surface of a substrate by electroplating, the film forming apparatus comprising:

• a container having an opening formed at a position opposing the substrate, the opening covered by an electrolyte membrane with a plating solution contained in the container;
• a pressing mechanism configured to press the substrate by the electrolyte membrane with a hydraulic pressure of the plating solution contained in the container;
• an anode disposed inside the container at a position opposing the electrolyte membrane;
• and
• a masking member disposed between the electrolyte membrane and the substrate, the masking member having a penetrating portion in the predetermined pattern formed therein,
• wherein
• the masking member includes a mask portion made of a rubber material and having the penetrating portion formed therein, and
• a contact prevention member made of a resin material is disposed on an opposing surface, which opposes the electrolyte membrane, of surfaces of the mask portion, the contact prevention member being configured to prevent contact between the mask portion and the electrolyte membrane.