Mask and method of manufacturing mask
AssigneeDai Nippon Printing Co., Ltd.
InventorsYasuko SONE, Yutaka OZAWA, Masashi HIRABAYASHI
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AssigneeDai Nippon Printing Co., Ltd.
InventorsYasuko SONE, Yutaka OZAWA, Masashi HIRABAYASHI
Estimating the term…
A mask includes a first layer that includes a first surface, a second surface that is located opposite the first surface, at least one first opening that extends from the first surface to the second surface, and a first wall surface that faces the first opening, a second layer that includes a third surface that faces the second surface, a fourth surface that is located opposite the third surface, and multiple second openings that extend from the third surface to the fourth surface and that overlap the first opening in plan view, and a first intermediate layer that is located between at least the second surface and the third surface. The first layer contains silicon. The second layer contains a resin material. The first wall surface includes multiple recessed portions that are arranged in a thickness direction of the first layer.
A mask comprising:
A method of manufacturing a mask, comprising:
A method of manufacturing a mask, comprising:
Dependencies are inferred from the claim text.