US 2025/0145535 A1 · METHOD AND DEVICE FOR PRODUCING A SILICON CARBIDE-COMPRISING WORKPIECE

Abstract

Disclosed are a method and an apparatus for manufacturing a silicon carbide-containing workpiece, in which: a carbon-containing shaped body (2) is held in a first reactor (1) at a first temperature which permits the transformation of the shaped body (2) into the silicon carbide-containing workpiece, a precursor containing carbon and silicon is fed into a second reactor (3) which is maintained at a second temperature which is higher than the first temperature and causes the precursor to be converted to a Si—C-containing gas, and the Si—C-containing gas is fed from the second reactor (3) into the first reactor (1) to the shaped body (2) held in the first reactor (1) at the first temperature, and the shaped body (2) is thereby transformed into the silicon carbide-containing workpiece.

Claims10

Dependent claims

A method of manufacturing a silicon carbide-containing workpiece, comprising:

holding a carbon-containing shaped body (2) in a first reactor (1) at a first temperature which permits the transformation of the shaped body (2) into the silicon carbide-containing workpiece,
supplying a carbon- and silicon-containing precursor into a second reactor (3) which is maintained at a second temperature which is higher than the first temperature and causes the precursor to be converted to a Si- and C-containing gas, and
feeding the gas containing Si and C from the second reactor (3) into the first reactor (1) to the shaped body (2) held at the first temperature in the first reactor (1), and thereby transforming the shaped body (2) into the workpiece containing silicon carbide.

Dependencies are inferred from the claim text.

Method and device for producing a silicon carbide-comprising workpiece

Life of this patent

Method and device for producing a silicon carbide-comprising workpiece

Life of this patent

Abstract

Claims10