Mems element

Abstract

A MEMS element comprising: a substrate comprising a back chamber; a vibrating membrane joined onto the substrate and comprising a movable electrode; and a backplate comprising a fixed electrode disposed so as to face the movable electrode. A wall connected to the backplate, slits, and a plurality of vibrating portions are formed in the vibrating membrane, the plurality of vibrating portions are present in either one of a region surrounded by a portion in which the wall and the vibrating membrane are joined and a region between the portion in which the wall and the vibrating membrane are joined and the peripheral portion of the vibrating membrane, and at least one vibrating portion is present in the region between the portion in which the wall and the vibrating membrane are joined and the peripheral portion of the vibrating membrane. A MEMS element comprising: a substrate comprising a back chamber; a vibrating membrane joined onto the substrate and comprising a movable electrode; and a backplate comprising a fixed electrode disposed so as to face the movable electrode. A wall connected to the backplate slits, and a plurality of vibrating portions are formed in the vibrating membrane, the plurality of vibrating portions are present in either one of a region surrounded by a portion in which the wall and the vibrating membrane are joined and a region between the portion in which the wall and the vibrating membrane are joined and the peripheral portion of the vibrating membrane, and at least one vibrating portion is present in the region between the portion in which the wall and the vibrating membrane are joined and the peripheral portion of the vibrating membrane.

Dependencies are inferred from the claim text.