Actuator, liquid discharge head, and production method of actuator
AssigneeCanon Kabushiki Kaisha
InventorsAKIRA SHIMAZU, TAKASHI IKEDA
Life of this patent
Estimating the term…
Abstract
An actuator includes a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode on a substrate in this order, a wiring line electrically connected to at least one of the first electrode and the second electrode, and an insulation layer arranged to contact and cover the wiring line, wherein a thickness of the wiring line is less than a thickness of the insulation layer in a direction perpendicular to the substrate, and the thickness of the insulation layer is 500 nm or less.
Claims20
An actuator comprising:
- a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode on a substrate in this order;
- a wiring line electrically connected to at least one of the first electrode and the second electrode;
- and
- an insulation layer arranged to contact and cover the wiring line,
- wherein a thickness of the wiring line is less than a thickness of the insulation layer in a direction perpendicular to the substrate, and the thickness of the insulation layer is 500 nm (nanometers) or less.
A liquid discharge head configured to discharge liquid from a discharge port, comprising:
- an actuator having a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode on a substrate in this order, a wiring line electrically connected to at least one of the first electrode and the second electrode, and an insulation layer arranged to contact and cover the wiring line,
- wherein a thickness of the wiring line is less than a thickness of the insulation layer in a direction perpendicular to the substrate, and the thickness of the insulation layer is 500 nm (nanometers) or less.
A production method of an actuator having a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode on a substrate in this order, a wiring line electrically connected to at least one of the first electrode and the second electrode, and an insulation layer arranged to contact and cover the wiring line, wherein a thickness of the wiring line is less than a thickness of the insulation layer in a direction perpendicular to the substrate, and the thickness of the insulation layer is 500 nm (nanometers) or less, the production method of the actuator comprising:
- forming the insulation layer using an atomic layer deposition (ALD) method.
Dependencies are inferred from the claim text.