Method of transferring an object using a stamp with shape memory polymer nanotips
AssigneePostech Research and Business Development Foundation
InventorsSeok KIM, Jun Hyung KIM
Life of this patent
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Abstract
Disclosed is a transfer technology, in which a shape memory polymer surface with dense nanotips is designed to apply a micro-sized object such as a micro-LED to a mass transfer technology. According to the disclosure, the nanotip shape memory polymer surface is in contact with objects in a heated state, and the nanotip shape memory polymer surface in the heated state is excellent in surface adaptability, thereby attaching/embedding and transferring micro-sized objects.
Claims20
A method of transferring an object using a stamp with shape memory polymer nanotips, the method comprising:
- a heating step in which a plurality of nanotips provided on an attachment surface is heated to a critical temperature or higher;
- a contacting step in which at least one of the nanotips comes into contact with the object;
- a pressing step in which the attachment surface is at least partially decreased in roughness to attach the object thereto;
- a cooling step in which the nanotips in a pressed state are cooled below the critical temperature;
- an aligning step in which the an object attached to the stamp is arranged on a receiving substrate;
- and
- a transferring step in which the nanotips arranged on the receiving substrate are heated to the critical temperature or higher to transfer a micro-sized an object to the receiving substrate.
Dependencies are inferred from the claim text.